Patent Assignment
Reel/Frame 018100/0851
Assignment of Assignor's Interest
Recorded: 2006-07-12
Pages: 3
Assignees
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
NIPPON VALQUA INDUSTRIES, LTD.
1-1, NISHISHINJUKU 2-CHOME, SHINJUKU-KU, TOKYO 163-0406, JAPAN
Covered Property
(1)
Sealing part and substrate processing apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.