Patent Assignment
Reel/Frame 018112/0894
Assignment of Assignor's Interest
Recorded: 2006-07-18
Pages: 3
Assignor
HATTA, MASATAKA
Executed: 2006-06-16
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Water Removal Apparatus and Inspection Apparatus Including Same