Assignment of Assignor's Interest

Recorded: 2006-08-14 Pages: 17

Assignors

PAREKH, BIPIN S.

Executed: 2006-07-19

ZELLER, ROBERT S.

Executed: 2006-08-02

HOLMES, RUSSELL J.

Executed: 2006-07-20

SPIEGELMAN, JEFFREY J.

Executed: 2006-07-20

Assignee

ENTEGRIS, INC.

3500 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318

Covered Property (1)

Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application

Application: 11/396,823 →

Publication: US 2006/0285091

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.