Patent Assignment
Reel/Frame 018156/0872
Assignment of Assignor's Interest
Recorded: 2006-08-04
Pages: 2
Assignor
DENGEL, GUENTHER
Executed: 2006-05-08
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Facettenspiegel mit einer vielzahl von spiegelsegmenten
Application:
60/794,759 →