Patent Assignment
Reel/Frame 018174/0604
Assignment of Assignor's Interest
Recorded: 2006-08-09
Pages: 2
Assignors
TOBA, TADANOBU
Executed: 2006-07-11
KIKUCHI, SHUJI
Executed: 2006-07-13
SAKURAI, YUICHI
Executed: 2006-07-11
LI, WEN
Executed: 2006-07-11
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Inspecting Defects of Semiconductor Device