Patent Assignment
Reel/Frame 018217/0933
Assignment of Assignor's Interest
Recorded: 2006-08-24
Pages: 2
Assignee
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC) VZW
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Atomic Layer Deposition (Ald) Method and Reactor for Producing a High Quality Layer
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.