Patent Assignment
Reel/Frame 018270/0492
Assignment of Assignor's Interest
Recorded: 2006-09-15
Pages: 4
Assignor
FIOLKA, DAMIAN
Executed: 2006-08-24
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System of a Microlithographic Projection Exposure Apparatus, and Depolarizer
Application:
11/456,368 →
Publication:
US 2007/0014504