Patent Assignment
Reel/Frame 018347/0058
Assignment of Assignor's Interest
Recorded: 2006-09-27
Pages: 2
Assignor
KOK, MARTINUS JOSEPH
Executed: 2006-08-15
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Apparatus for Angular-Resolved Spectroscopic Lithography Characterization