Patent Assignment
Reel/Frame 018348/0392
Assignment of Assignor's Interest
Recorded: 2006-08-27
Pages: 5
Assignors
PELLEMANS, HENRICUS PETRUS MARIA
Executed: 2006-07-26
DEN BOEF, ARIE JEFFREY
Executed: 2006-08-11
CORBEIJ, WILHELMUS MARIA
Executed: 2006-08-07
VAN DER LAAN, HANS
Executed: 2006-08-11
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Metrology Apparatus, Lithographic Apparatus, Process Apparatus Metrology Method and Device Manufacturing Method