Patent Assignment
Reel/Frame 018351/0688
Assignment of Assignor's Interest
Recorded: 2006-10-05
Pages: 3
Assignors
SCHALLER, MATTHIAS
Executed: 2006-03-22
SCHULZE, UWE
Executed: 2006-03-22
BARANYAI, MATHIAS
Executed: 2006-03-22
Assignee
ADVANCED MICRO DEVICES, INC.
5204 EAST BEN WHITE BOULEVARD, AUSTIN, TEXAS, 78741
Covered Property
(1)
Method and System for Advanced Process Control in an Etch System by Gas Flow Control on the Basis of Cd Measurements
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.