Patent Assignment
Reel/Frame 018403/0265
Assignment of Assignor's Interest
Recorded: 2006-10-16
Pages: 2
Assignee
HITACHI, LTD.
6-6, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam Irradiation System and Method of Extracting Charged Particle Beam