Patent Assignment
Reel/Frame 018425/0102
Assignment of Assignor's Interest
Recorded: 2006-10-23
Pages: 2
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method for Forming Insulation Film Having High Density