Patent Assignment
Reel/Frame 018539/0528
Assignment of Assignor's Interest
Recorded: 2006-11-20
Pages: 6
Assignors
SHAMIRYAN, DENIS
Executed: 2006-11-17
PARASCHIV, VASILE
Executed: 2006-11-17
DEMAND, MARC
Executed: 2006-11-17
Assignee
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC)
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Plasma Composition for Selective High-K Etch