Patent Assignment
Reel/Frame 018542/0079
Assignment of Assignor's Interest
Recorded: 2006-11-21
Pages: 4
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and Apparatus for Integrating Metrology with Etch Processing