Patent Assignment
Reel/Frame 018753/0098
Assignment of Assignor's Interest
Recorded: 2007-01-12
Pages: 4
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method for Automatic Determination of Semiconductor Plasma Chamber Matching and Source of Fault by Comprehensive Plasma Monitoring