Patent Assignment
Reel/Frame 018798/0560
Assignment of Assignor's Interest
Recorded: 2007-01-11
Pages: 3
Assignors
SHIH, HONG
Executed: 2007-01-03
OUTKA, DUANE
Executed: 2007-01-04
LIU, SHENJIAN
Executed: 2007-01-04
DAUGHERTY, JOHN
Executed: 2007-01-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Extending Lifetime of Yttrium Oxide as a Plasma Chamber Material