Patent Assignment
Reel/Frame 018846/0549
Assignment of Assignor's Interest
Recorded: 2007-02-02
Pages: 4
Assignors
CHEN, ROBERT
Executed: 2007-01-12
LAI, CANFENG
Executed: 2007-01-12
CHEN, XINGLONG
Executed: 2007-01-22
LUO, WEIYI
Executed: 2007-01-12
HUA, ZHONG QIANG
Executed: 2007-01-12
LU, SIQING
Executed: 2007-01-12
RASHEED, MUHAMMAD
Executed: 2007-01-12
LIANG, QIWEI
Executed: 2007-01-12
LUBOMIRSKY, DMITRY
Executed: 2007-01-12
YIEH, ELLIE Y.
Executed: 2007-01-12
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Internal Balanced Coil for Inductively Coupled High Density Plasma Processing Chamber