Patent Assignment
Reel/Frame 018852/0190
Assignment of Assignor's Interest
Recorded: 2007-01-30
Pages: 5
Assignors
SIMONS, HUBERTUS JOHANNES GERTRUDUS
Executed: 2006-08-30
MEGENS, HENRICUS JOHANNES LAMBERTUS
Executed: 2006-08-30
MOS, EVERHARDUS CORNELIS
Executed: 2006-07-24
VERSTAPPEN, LEONARDUS HENRICUS MARIE
Executed: 2006-07-24
WERKMAN, ROY
Executed: 2006-08-30
VERHOEVEN, HENRICUS JACOBUS MARIA
Executed: 2006-08-30
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method of Selecting a Grid Model for Correcting a Process Recipe for Grid Deformations in a Lithographic Apparatus and Lithographic Assembly Using the Same