Patent Assignment
Reel/Frame 018922/0903
Assignment of Assignor's Interest
Recorded: 2007-02-22
Pages: 8
Assignors
FUJIMURA, AKIRA
Executed: 2007-01-30
HARA, DAISUKE
Executed: 2007-01-15
KOMURO, KATSUO
Executed: 2007-01-05
MITSUHASHI, TAKASHI
Executed: 2007-01-05
Assignee
CADENCE DESIGN SYSTEMS, INC.
2655 SEELY AVENUE, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method and System for Improvement of Dose Correction for Particle Beam Writers