Patent Assignment
Reel/Frame 018976/0674
Assignment of Assignor's Interest
Recorded: 2007-03-06
Pages: 3
Assignee
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC) VZW
KAPELDREEF 75, LEUVEN, B-3001, BELGIUM
Covered Property
(1)
Methods and Devices for Lithography Using Electromagnetic Radiation with Short Wavelengths
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.