Patent Assignment
Reel/Frame 018995/0620
Assignment of Assignor's Interest
Recorded: 2007-03-12
Pages: 3
Assignor
SEWELL, HARRY
Executed: 2003-12-18
Assignee
ASML HOLDING N.V.
DE RUN 6501, NL - 5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method and System for Correction of Intrinsic Birefringence in UV Microlithography
Application:
11/613,806 →
Publication:
US 2007/0091440