Patent Assignment
Reel/Frame 019024/0056
Assignment of Assignor's Interest
Recorded: 2007-03-16
Pages: 3
Assignor
MENON, RAJESH
Executed: 2007-03-13
Assignee
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
77 MASSACHUSETTS AVENUE, CAMBRIDGE, MASSACHUSETTS, 02139
Covered Property
(1)
Resolution Enhancement in Optical Lithography via Absorbance-Modulation Enabled Multiple Exposures