Patent Assignment
Reel/Frame 019043/0566
Assignment of Assignor's Interest
Recorded: 2007-03-21
Pages: 2
Assignor
MIYA, KATSUHIKO
Executed: 2007-01-31
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.