Patent Assignment
Reel/Frame 019093/0501
Assignment of Assignor's Interest
Recorded: 2007-03-30
Pages: 2
Assignor
KULP, JOHN M.
Executed: 2007-03-28
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Apparatus and Method for Predictive Temperature Correction During Thermal Processing