Patent Assignment
Reel/Frame 019152/0974
Assignment of Assignor's Interest
Recorded: 2007-04-12
Pages: 8
Assignors
FUNK, MERRITT
Executed: 2007-02-07
DESHPANDE, SACHIN
Executed: 2007-02-27
LALLY, KEVIN
Executed: 2007-02-02
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Real-Time Parameter Tuning for Etch Processes