Assignment of Assignor's Interest

Recorded: 2007-04-17 Pages: 2

Assignors

TAMADA, OSAMU

Executed: 2007-02-28

SANADA, MASAKAZU

Executed: 2007-03-01

GOTO, TOMOHIRO

Executed: 2007-03-02

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN

Covered Property (1)

Antireflection Film Forming Method, and Substrate Treating Apparatus

Application: 11/670,042 →

Publication: US 2007/0183051

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.