Patent Assignment
Reel/Frame 019178/0520
Assignment of Assignor's Interest
Recorded: 2007-03-30
Pages: 3
Assignors
KANEKO, HIROYUKI
Executed: 2007-03-23
OGAWA, TAKAHIRO
Executed: 2007-03-23
SUGITA, KENICHI
Executed: 2007-03-23
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Holding Rotating Mechanism, and Substrate Processing Apparatus