Patent Assignment
Reel/Frame 019189/0784
Assignment of Assignor's Interest
Recorded: 2007-04-20
Pages: 8
Assignors
MIMKEN, VICTOR
Executed: 2006-11-06
YALAMANCHILI, M. RAO
Executed: 2006-11-13
ROSATO, JOHN J.
Executed: 2006-11-14
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Apparatus and Method for Single Substrate Processing Using Megasonic-Assisted Drying
Application:
11/534,599 →
Publication:
US 2007/0119544