Patent Assignment
Reel/Frame 019216/0505
Assignment of Assignor's Interest
Recorded: 2007-04-26
Pages: 3
Assignors
KANEYAMA, KOJI
Executed: 2007-04-20
SHIGEMORI, KAZUHITO
Executed: 2007-04-03
KANAOKA, MASASHI
Executed: 2007-04-03
MIYAGI, TADASHI
Executed: 2007-04-18
YASUDA, SHUICHI
Executed: 2007-04-03
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME,, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Method of Processing Substrate, Substrate Processing System and Substrate Processing Apparatus
Application:
11/740,397 →
Publication:
US 2007/0253710
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.