Patent Assignment
Reel/Frame 019217/0755
Assignment of Assignor's Interest
Recorded: 2007-04-26
Pages: 3
Assignor
YAMADA, YOUHEI
Executed: 2007-04-20
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Seal Member, Depressurized Chamber, Depressurizing Processing Apparatus, Seal Mechanism of Depressurized Chamber, and Method of Manufacturing a Depressurized Chamber