Patent Assignment
Reel/Frame 019282/0835
Assignment of Assignor's Interest
Recorded: 2007-05-11
Pages: 9
Assignors
FARMAKIS, FILIPPOS
Executed: 2006-11-21
ELYAAKOUBI, MUSTAPHA
Executed: 2006-11-29
RIOU, BENOIT
Executed: 2006-12-03
CHOUMAS, EMMANUIL
Executed: 2006-11-22
IRZYK, MICHAEL
Executed: 2006-12-01
KUDELA, JOZEF
Executed: 2007-04-24
Assignee
OC OERLIKON BALZERS AG
IRAMALI 18, BALZERS, LI-9496, LIECHTENSTEIN
Covered Property
(1)
Cleaning Means for Large Area Pecvd Devices Using a Remote Plasma Source
Application:
11/549,679 →
Publication:
US 2008/0035169
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.