Assignment of Assignor's Interest

Recorded: 2007-05-25 Received: 2007-05-25 Pages: 6

Assignor

BROOKS AUTOMATION, INC.

Executed: 2007-03-27

Assignee

APPLIED MATERIALS, INC.

3050 BOWERS AVENUE, P.O. BOX 58039, SANTA CLARA, CA, 95054-3299, UNITED STATES

Covered Properties (7)

Optimized Temperature Controller for Cold Mass Introduction

Application: 10/628,981 →

Application Class Extensions

Application: 10/226,907 →

Semiconductor Run-to-Run Control System with State and Model Parameter Estimation

Application: 10/171,758 →

Device and Method for Communicating Data in a Process Control System

Application: 10/162,733 →

Semiconductor Run-to-Run Control System with Missing and Out-of-Order Measurement Handling

Application: 10/046,359 →

System and Method for Automated Monitoring and Assessment of Fabrication Facility

Application: 09/978,500 →

Integrated scheduler and material control system

Application: 09/804,971 →