Patent Assignment
Reel/Frame 019348/0959
Assignment of Assignor's Interest
Recorded: 2007-05-24
Pages: 4
Assignor
OKITA, SHINICHI
Executed: 2007-04-26
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Adjustment Method, Substrate Processing Method, Substrate Processing Apparatus, Exposure Apparatus, Inspection Apparatus, Measurement and/or Inspection System, Processing Apparatus, Computer System, Program and Information Recording Medium