Assignment of Assignor's Interest

Recorded: 2007-05-29 Received: 2007-05-29 Pages: 5

Assignor

AKRION, INC.

Executed: 2007-05-24

Assignee

AKRION TECHNOLOGIES, INC..

1105 N. MARKET ST., SUITE 1300, WILMINGTON, DE, 19899, UNITED STATES

Covered Properties (2)

Backside cleaning of substrates

Application: 60/885,978 →

System and method of cleaning substrates using a subambient process solution

Application: 11/544,802 →