Patent Assignment
Reel/Frame 019350/0941
Assignment of Assignor's Interest
Recorded: 2007-05-29
Pages: 5
Assignors
KANEYAMA, KOJI
Executed: 2007-05-22
SHIGEMORI, KAZUHITO
Executed: 2007-05-23
KANAOKA, MASASHI
Executed: 2007-04-24
MIYAGI, TADASHI
Executed: 2007-04-24
YASUDA, SHUICHI
Executed: 2007-05-21
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Application:
11/754,631 →
Publication:
US 2007/0274711
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.