Patent Assignment
Reel/Frame 019364/0245
Assignment of Assignor's Interest
Recorded: 2007-05-22
Pages: 2
Assignor
CHANG, CHIENLIU
Executed: 2007-05-18
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Dry Etching Method for Oxide Semiconductor Film