Patent Assignment
Reel/Frame 019374/0603
Assignment of Assignor's Interest
Recorded: 2007-05-15
Pages: 3
Assignors
WATANABE, TSUKASA
Executed: 2007-04-09
SHINDO, NAOKI
Executed: 2007-04-10
HIROSHIRO, KOUKICHI
Executed: 2007-04-11
KAMIKAWA, YUJI
Executed: 2007-04-12
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Substrate Cleaning Method, Substrate Cleaning System and Program Storage Medium