Patent Assignment
Reel/Frame 019462/0419
Assignment of Assignor's Interest
Recorded: 2007-06-21
Pages: 4
Assignors
HENDRIKS, MENSO
Executed: 2007-05-23
KNAPP, MARTIN
Executed: 2007-05-04
HAUKKA, SUVI
Executed: 2007-05-23
Assignee
ASM INTERNATIONAL N.V.
JAN VAN EYCKLAAN 10, BILTHOVEN, 3723 BC, NETHERLANDS
Covered Property
(1)
Method for Depositing Thin Films by Mixed Pulsed Cvd and Ald