Patent Assignment
Reel/Frame 019506/0313
Assignment of Assignor's Interest
Recorded: 2007-06-18
Pages: 3
Assignors
PANDHUMSOPORN, TAMARAK
Executed: 2007-06-01
CHUNG, PATRICK
Executed: 2007-06-01
SETO, JACKIE
Executed: 2007-06-01
SADJADI, S.M. REZA
Executed: 2007-06-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Minimization of Mask Undercut on Deep Silicon Etch