Patent Assignment
Reel/Frame 019589/0621
Assignment of Assignor's Interest
Recorded: 2007-07-23
Pages: 3
Assignors
INAMASU, TOSHIFUMI
Executed: 2007-06-29
YAMASAKI, TSUYOSHI
Executed: 2007-07-02
MIYAZAKI, KAZUHITO
Executed: 2007-07-04
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Stage Apparatus and Application Processing Apparatus