Patent Assignment
Reel/Frame 019698/0419
Assignment of Assignor's Interest
Recorded: 2007-08-15
Pages: 6
Assignors
PAREKH, BIPIN
Executed: 2007-06-19
XIA, ANNIE
Executed: 2007-06-19
CLARKE, MICHAEL
Executed: 2007-06-25
SMITH, JOSEPH
Executed: 2007-06-19
Assignee
ENTEGRIS, INC.
3500 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Apparatus and method for conditioning an immersion fluid
Application:
60/931,275 →