Patent Assignment
Reel/Frame 019926/0279
Assignment of Assignor's Interest
Recorded: 2007-10-05
Pages: 4
Assignors
CHEN, ZHAN
Executed: 2007-09-24
LUO, KAI
Executed: 2007-09-20
VACASSY, ROBERT
Executed: 2007-09-24
Assignee
CABOT MICROELECTRONICS CORPORATION
870 NORTH COMMONS DRIVE, AURORA, ILLINOIS, 60504
Covered Property
(1)
Compositions and methods for chemical-mechanical polishing of phase change materials
Application:
60/962,105 →