Assignment of Assignor's Interest

Recorded: 2007-10-17 Pages: 2

Assignors

OSADA, NAOYUKI

Executed: 2007-10-04

SAWAMURA, MASASHI

Executed: 2007-10-04

HASEGAWA, KOJI

Executed: 2007-10-04

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME,, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN

Covered Property (1)

Nozzle and a Substrate Processing Apparatus Including the Same

Patent: 9,027,577 →

Application: 11/871,595 →

Publication: US 2008/0251107

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.