Patent Assignment
Reel/Frame 019981/0263
Assignment of Assignor's Interest
Recorded: 2007-10-18
Pages: 4
Assignors
GOTO, TOMOHIRO
Executed: 2007-09-28
SANADA, MASAKAZU
Executed: 2007-09-28
SHIGEMORI, KAZUHITO
Executed: 2007-10-02
TAMADA, OSAMU
Executed: 2007-09-28
YASUDA, SHUICHI
Executed: 2007-10-01
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.