Patent Assignment
Reel/Frame 020073/0109
Assignment of Assignor's Interest
Recorded: 2007-10-30
Pages: 4
Assignors
HASEBE, KAZUHIDE
Executed: 2007-08-06
CHOU, PAO-HWA
Executed: 2007-08-06
UMEZAWA, KOTA
Executed: 2007-08-06
KADONAGA, KENTARO
Executed: 2007-09-03
CHANG, HAO-HSIANG
Executed: 2007-09-28
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Film Formation Method and Apparatus for Semiconductor Process