Patent Assignment
Reel/Frame 020187/0368
Assignment of Assignor's Interest
Recorded: 2007-12-03
Pages: 4
Assignors
IKEDA, HISAO
Executed: 2007-11-28
AOYAMA, TOMOYA
Executed: 2007-11-28
IBE, TAKAHIRO
Executed: 2007-11-28
HIRAKATA, YOSHIHARU
Executed: 2007-11-28
YAMAZAKI, SHUNPEI
Executed: 2007-11-28
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Film Formation Apparatus, Film Formation Method, Manufacturing Apparatus, and Method for Manufacturing Light-Emitting Device