Patent Assignment
Reel/Frame 020209/0159
Assignment of Assignor's Interest
Recorded: 2007-11-30
Pages: 3
Assignee
CANON ANELVA CORPORATION
2-5-1 KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Power Supply Apparatus and Deposition Method Using the Power Supply Apparatus