Patent Assignment
Reel/Frame 020257/0848
Assignment of Assignor's Interest
Recorded: 2007-12-17
Pages: 4
Assignors
KATO, HITOSHI
Executed: 2005-11-11
FUKUSHIMA, KOHEI
Executed: 2005-11-11
YONEZAWA, MASATO
Executed: 2005-11-11
HIRAKA, JUNYA
Executed: 2005-11-11
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Cvd Method for Forming Silicon Nitride Film