Patent Assignment
Reel/Frame 020272/0752
Change of Name
Recorded: 2007-12-19
Pages: 5
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES
Executed: 2002-10-28
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
Application:
11/985,674 →
Publication:
US 2008/0068599
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.