Patent Assignment
Reel/Frame 020381/0582
Assignment of Assignor's Interest
Recorded: 2008-01-09
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD
TENJINKITA-CHO, 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Apparatus for Supporting Substrate, Apparatus for Measuring Surface Potential, Apparatus for Measuring Film Thickness, and Apparatus for Inspecting Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.